Semiconductor Electrical Property Measurement System
Physical Property Measurement Laboratory (S309)
Purpose:
This system is capable of precisely measuring the tiny electrical signal output of semiconductors and nanomaterials, with an accuracy down to 0.1 fA. Equipped with a vacuum system, it allows for more versatile control over the environmental conditions during measurements, simulating the operating conditions of various semiconductor devices.
Responsible Professor: Prof. Ping-Hung Yeh
